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Glavni meni

IEC 62047-3:2006 ED1

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
15. 8. 2006.

Опште информације

60.60     15. 8. 2006.

IEC

TC 47/SC 47F

Međunarodni standard

31.080.99  

engleski   francuski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.

Životni ciklus

TRENUTNO

OBJAVLJEN
IEC 62047-3:2006 ED1
60.60 Standard objavljen
15. 8. 2006.