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ISO 21466:2019

Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
13. 12. 2019.

Опште информације

90.93     17. 7. 2025.

ISO

ISO/TC 202/SC 4

Međunarodni standard

37.020  

engleski  

Kupovina

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Apstrakt

This document specifies the structure model with related parameters, file format and fitting procedure for characterizing critical dimension (CD) values for wafer and photomask by imaging with a critical dimension scanning electron microscope (CD-SEM) by the model-based library (MBL) method. The method is applicable to linewidth determination for specimen, such as, gate on wafer, photomask, single isolated or dense line feature pattern down to size of 10 nm.

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OBJAVLJEN
ISO 21466:2019
90.93 Odluka o potvrđivanju standarda
17. 7. 2025.