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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
24. 8. 2020.

Опште информације

90.60     3. 12. 2025.

ISO

ISO/TC 206

Međunarodni standard

81.060.30  

engleski  

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Apstrakt

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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OBJAVLJEN
ISO 22278:2020
90.60 Završetak postupka preispitivanja standarda
3. 12. 2025.