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Glavni meni

ISO 23131:2021

Ellipsometry — Principles
22. 4. 2021.

Опште информације

90.92     12. 9. 2026.

ISO

ISO/TC 107

Međunarodni standard

17.020  

engleski   francuski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Životni ciklus

TRENUTNO

OBJAVLJEN
ISO 23131:2021
90.92 Odluka o izmeni ili reviziji standarda
12. 9. 2026.

REVIDIRAN OD

PROJEKAT
ISO/AWI 23131-1

Nacionalna preuzimanja

Elipsometrija – Principi

60.60   Standard objavljen