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Glavni meni

IEC/TR 63258:2021

Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
22. 3. 2021.

Опште информације

60.60     22. 3. 2021.

IEC

ISO/TC 229

Tehnički izveštaj

07.120  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.


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TRENUTNO

OBJAVLJEN
IEC/TR 63258:2021
60.60 Standard objavljen
22. 3. 2021.