Objavljen
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
POVUČEN
ISO 25178-604:2013
OBJAVLJEN
ISO 25178-604:2025
60.60
Standard objavljen
14. 2. 2025.
Geometrijske specifikacije proizvoda (GPS) – Tekstura površine: Područja – Deo 604: Konstrukcija i karakteristike beskontaktnih instrumenata (koherentna interferometrija)
60.60 Standard objavljen