ISO/AWI 23420

Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis

Apstrakt

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.