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ISO/TR 15969:2021

Surface chemical analysis — Depth profiling — Measurement of sputtered depth
17. 3. 2021.

Опште информације

60.60     17. 3. 2021.

ISO

ISO/TC 201/SC 4

Tehnički izveštaj

71.040.40  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling. 
The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.

Životni ciklus

PRETHODNO

POVUČEN
ISO/TR 15969:2001

TRENUTNO

OBJAVLJEN
ISO/TR 15969:2021
60.60 Standard objavljen
17. 3. 2021.