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ISO 14606:2022

Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials
21. 11. 2022.

Опште информације

60.60     21. 11. 2022.

ISO

ISO/TC 201/SC 4

Međunarodni standard

71.040.40  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.

Životni ciklus

PRETHODNO

POVUČEN
ISO 14606:2015

TRENUTNO

OBJAVLJEN
ISO 14606:2022
60.60 Standard objavljen
21. 11. 2022.