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ISO/PWI 16700

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Опште информације

00.00     23. 11. 2023.

ISO

ISO/TC 202/SC 4

Međunarodni standard

Apstrakt

This document specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material.
This document does not apply to the dedicated critical dimension measurement SEM.

Životni ciklus

PRETHODNO

OBJAVLJEN
ISO 16700:2016

TRENUTNO

PROJEKAT
ISO/PWI 16700
00.00 Podnet predlog novog projekta
23. 11. 2023.