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ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
18. 7. 2016.

Опште информације

90.93     23. 11. 2023.

ISO

ISO/TC 202/SC 4

Međunarodni standard

37.020  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Životni ciklus

PRETHODNO

POVUČEN
ISO 16700:2004

TRENUTNO

OBJAVLJEN
ISO 16700:2016
90.93 Odluka o potvrđivanju standarda
23. 11. 2023.

REVIDIRAN OD

PROJEKAT
ISO/PWI 16700