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ISO 14706:2014

Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
25. 7. 2014.

Опште информације

90.20     15. 4. 2026.

ISO

ISO/TC 201

Međunarodni standard

71.040.40  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

ISO 14706:2014 specifies a TXRF method for the measurement of the atomic surface density of elemental contamination on chemomechanically polished or epitaxial silicon wafer surfaces. The method is applicable to the following: elements of atomic number from 16 (S) to 92 (U); contamination elements with atomic surface densities from 1 × 1010 atoms/cm2 to 1 × 1014 atoms/cm2; contamination elements with atomic surface densities from 5 × 108 atoms/cm2 to 5 × 1012 atoms/cm2 using a VPD (vapour-phase decomposition) specimen preparation method.

Životni ciklus

PRETHODNO

POVUČEN
ISO 14706:2000

TRENUTNO

OBJAVLJEN
ISO 14706:2014
90.20 Početak postupka preispitivanja standarda
15. 4. 2026.

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